|
High Purity Chemical for Advanced Microelectronics Manufacturing
Phosphoric Acid Electronic Grade is a colorless, odorless, and transparent liquid essential for high-precision manufacturing processes in the microelectronics industry. With a melting point of 42.35℃, it exhibits controlled reactivity, releasing significant heat upon contact with strong etchants while maintaining a balance of acidity stronger than weak acids like acetic acid but weaker than strong mineral acids.
| Items | Units | E1 (LCD Grade) | E2 (IC Grade) |
|---|---|---|---|
| H3PO4 | % | 85-87 | 85-87 |
| H3PO3 | % | ≤0.005 | ≤0.001 |
| NO3 | mg/kg | ≤5 | ≤0.5 |
| SO4 | mg/kg | ≤10 | ≤5 |
| Cl | mg/kg | ≤1 | ≤0.5 |
| Al | µg/kg | ≤200 | ≤50 |
| B | µg/kg | ----- | ≤50 |
| Sb | µg/kg | ≤3000 | ≤300 |
| As | µg/kg | ≤100 | ≤20 |
| Ba | µg/kg | ≤100 | ≤20 |
| Cd | µg/kg | ≤100 | ≤20 |
| Ca | µg/kg | ≤1000 | ≤50 |
| Cr | µg/kg | ≤100 | ≤20 |
| Co | µg/kg | ≤100 | ≤20 |
| Cu | µg/kg | ≤50 | ≤20 |
| Ga | µg/kg | ≤100 | ≤10 |
| Au | µg/kg | ≤100 | ≤10 |
| Fe | µg/kg | ≤300 | ≤50 |
| Pb | µg/kg | ≤100 | ≤20 |
| Li | µg/kg | ≤100 | ≤10 |
| Mg | µg/kg | ≤100 | ≤20 |
| Mn | µg/kg | ≤100 | ≤20 |
| Ni | µg/kg | ≤100 | ≤20 |
| K | µg/kg | ≤100 | ≤20 |
| Ag | µg/kg | ≤100 | ≤20 |
| Na | µg/kg | ≤500 | ≤50 |
| Sn | µg/kg | ------ | ≤10 |
| Sr | µg/kg | ≤100 | ≤20 |
| Ti | µg/kg | ≤100 | ≤50 |
| Zn | µg/kg | ≤100 | ≤50 |
| Granule | µm,pcs/ml | ------ | ----- |
english
Русский
Español
العربية
